Determination of Oxygen Concentration in Heavily Doped Silicon Wafer by La-ser Induced Breakdown Spectroscopy
Author:
Publisher
China Science Publishing & Media Ltd.
Subject
Inorganic Chemistry,General Materials Science
Cited by 14 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Qualitative and quantitative discrimination of major elements in Chitosan (natural polymer) using laser induced breakdown spectroscopy;Optics & Laser Technology;2022-10
2. Applying convolutional neural networks (CNN) for end-to-end soil analysis based on laser-induced breakdown spectroscopy (LIBS) with less spectral preprocessing;Computers and Electronics in Agriculture;2022-08
3. Quantification of Aluminum Gallium Arsenide (AlGaAs) Wafer Plasma Using Calibration-Free Laser-Induced Breakdown Spectroscopy (CF-LIBS);Molecules;2022-06-10
4. Modified self‐adaptive model for improving the prediction accuracy of soil organic matter by laser‐induced breakdown spectroscopy;Soil Science Society of America Journal;2020-11
5. Optimization of measuring procedure of farmland soils using laser‐induced breakdown spectroscopy;Soil Science Society of America Journal;2020-07
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