Influence of Substrate Temperature on the Morphology, Composition and Growth Rate of SiC Films Deposited by PECVD
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Published:2013-06-21
Issue:2
Volume:28
Page:201-206
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ISSN:1000-324X
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Container-title:Journal of Inorganic Materials
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language:en
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Short-container-title:Journal of Inorganic Materials
Author:
YU Fang-Li,BAI YU,QIN Yi,YUE Dong,LUO Cai-Jun,YANG Jian-Feng
Publisher
China Science Publishing & Media Ltd.
Subject
Inorganic Chemistry,General Materials Science