Study on Etching Process and Mechanism of New Phase Change Material Ti0.5Sb2Te3
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Published:2013-12-16
Issue:12
Volume:28
Page:1364-1368
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ISSN:1000-324X
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Container-title:Journal of Inorganic Materials
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language:en
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Short-container-title:Journal of Inorganic Materials
Author:
ZHANG Xu,LIU Bo,SONG San-Nian,YAO Dong-Ning,ZHU Min,RAO Feng,WU Liang-Cai,SONG Zhi-Tang,FENG Song-Lin
Publisher
China Science Publishing & Media Ltd.
Subject
Inorganic Chemistry,General Materials Science