Effect of Rapid Thermal Annealing on Structural and Electrical Characteristics of Ni-Al-O Gate Dielectrics
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Published:2011-03-10
Issue:3
Volume:26
Page:257-260
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ISSN:1000-324X
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Container-title:Journal of Inorganic Materials
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language:en
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Short-container-title:Journal of Inorganic Materials
Author:
LI Man,LIU Bao-Ting,WANG Yu-Qiang,WANG Kuan-Mao
Publisher
China Science Publishing & Media Ltd.
Subject
Inorganic Chemistry,General Materials Science