High-speed Homoepitaxial Growth of 4H-SiC
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Published:2012-08-24
Issue:8
Volume:27
Page:785-789
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ISSN:1000-324X
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Container-title:Journal of Inorganic Materials
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language:en
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Short-container-title:Journal of Inorganic Materials
Author:
ZHU Ming-Xing,SHI Biao,CHEN Yi,LIU Xue-Chao,SHI Er-Wei
Publisher
China Science Publishing & Media Ltd.
Subject
Inorganic Chemistry,General Materials Science