Determination of Relative Sensitivity Factors ofImpurities in Poly-Silicon by Derect Current Glow Discharge Mass Spectrometry
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Published:2012
Issue:1
Volume:40
Page:66
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ISSN:0253-3820
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Container-title:CHINESE JOURNAL OF ANALYTICAL CHEMISTRY (CHINESE VERSION)
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language:en
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Short-container-title:CHINESE JOURNAL OF ANALYTICAL CHEMISTRY (CHINESE VERSION)
Author:
GAO Yun,LU Hua,DAI Xiu-Jun,CHEN Yao,YUAN Ying-Jin
Publisher
China Science Publishing & Media Ltd.
Subject
Analytical Chemistry