Effect of CH4 flow rate on the optical properties of Boron-doped a-SiC:H films
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Published:2012-03-23
Issue:1
Volume:31
Page:5-10
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ISSN:1001-9014
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Container-title:JOURNAL OF INFRARED AND MILLIMETER WAVES
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language:en
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Short-container-title:Journal of Infrared and Millimeter Waves
Author:
DOU Ya-Nan,HE Yue,MA Xiao-Guang,QIAO Qi,CHEN Xiao-Jing,WANG Yong-Qian,CHEN Robin,CHU Jun-Hao
Publisher
China Science Publishing & Media Ltd.
Subject
Atomic and Molecular Physics, and Optics