Nitrogen Incorporation of Nanostructured Amorphous Carbon Thin Films by Aerosol-Assisted Chemical Vapor Deposition
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Published:2013-08-25
Issue:4
Volume:14
Page:165-171
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ISSN:1229-7607
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Container-title:Transactions on Electrical and Electronic Materials
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language:en
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Short-container-title:Transactions on Electrical and Electronic Materials
Author:
Fadzilah A.N.,Dayana K.,Rusop M.
Publisher
The Korean Institute of Electrical and Electronic Material Engineers
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials