Study of Via-Typed Air-Gap for Logic Devices Applications below 45 nm Node
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Published:2011-08-25
Issue:4
Volume:12
Page:131-134
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ISSN:1229-7607
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Container-title:Transactions on Electrical and Electronic Materials
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language:en
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Short-container-title:Transactions on Electrical and Electronic Materials
Author:
Kim Sang-Yong,Kim Il-Soo,Jeong Woo-Yang
Publisher
The Korean Institute of Electrical and Electronic Material Engineers
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials