Effective Stress Modeling of Membranes Made of Gold and Aluminum Materials Used in Radio-Frequency Microelectromechanical System Switches
Author:
Publisher
The Korean Institute of Electrical and Electronic Material Engineers
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials
Link
http://ocean.kisti.re.kr/downfile/crosscheck/kieeme/JAKO201324134428204.pdf
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