ON THE COMPARISON OF REACTIVE-ION ETCHING MECHANISMS FOR SiO2 AND Si3N4 IN HBr + Ar PLASMA

Abstract

This work investigated the influence of component ratio in the HBr + Ar gas mixture on electro-physical plasma parameters, steady-state densities of active species and reactive-ion etching (RIE) kinetics for SiO2 and Si3N4 under conditions of inductive RF (13.56 MHz) discharge. The combination of plasma diagnostics by Langmuir probes and plasma modeling indicated that an increase in Ar content at constant gas pressure and input power a) caused an increase in electron temperature and densities of charged species; b) results in increasing ion bombardment intensity; and c) leads to the nearly proportional decrease in Br atoms density and flux. It was found that variations of SiO2 and Si3N4 etching rates vs. mixture composition are qualitatively similar while the maximum difference in corresponding absolute values takes place in pure HBr plasma. The analysis of RIE mechanisms was carried out using model-predicted data on fluxes of ions and bromine atoms. It was found that the dominant SiO2 etching mechanism is the ion-assisted chemical reaction which is characterized by the nearly-constant rate in the range of 0–80% Ar due to an increase in the effective reaction probability. That is why the noticeable intensification of physical sputtering with increasing Ar fraction in a feed gas causes the only weak growth of obtained SiO2 RIE rate. Oppositely, the Si3N4 etching process is mainly contributed by the physical sputtering while the efficiency of ion-stimulated chemical reaction is limited by the low reaction probability. This provides both slower etching process (especially in Ar-poor plasmas) and stronger sensitivity of etching rate to the change in mixture composition. For citation: Efremov A.M., Betelin V.B., Kwon K.-H. On the comparison of reactive-ion etching mechanisms for SiO2 and Si3N4 in HBr + Ar plasma. ChemChemTech [Izv. Vyssh. Uchebn. Zaved. Khim. Khim. Tekhnol.]. 2023. V. 66. N 6. P. 37-45. DOI: 10.6060/ivkkt.20236606.6786.