PLASMA PARAMETERS AND ACTIVE SPECIES KINETICS IN Cl2 + BCl3 + Ar GAS MIXTURE
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Published:2022
Issue:3
Volume:65
Page:14-21
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ISSN:0579-2991
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Container-title:ChemChemTech
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language:
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Short-container-title:IZVESTIYA VYSSHIKH UCHEBNYKH ZAVEDENII KHIMIYA KHIMICHESKAYA TEKHNOLOGIYA
Publisher
Ivanovo State University of Chemistry and Technology
Subject
General Chemical Engineering,General Chemistry