COMPARATIVE STUDY OF PLASMA PARAMETERS AND COMPOSITIONS IN CF4, Cl2 AND HBr + Ar GAS MIXTURES
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Published:2016
Issue:10
Volume:59
Page:
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ISSN:0579-2991
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Container-title:IZVESTIYA VYSSHIKH UCHEBNYKH ZAVEDENIY KHIMIYA KHIMICHESKAYA TEKHNOLOGIYA
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language:
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Short-container-title:ivkkt
Publisher
Ivanovo State University of Chemistry and Technology
Subject
General Chemical Engineering,General Chemistry