Preparation of Al-O-N Coatings by r.f. Reactive Sputtering-Reference-Cited by-同舟云学术

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Preparation of Al-O-N Coatings by r.f. Reactive Sputtering

Published:2008 Issue:11 Volume:55 Page:795-800
ISSN:0532-8799
Container-title:Journal of the Japan Society of Powder and Powder Metallurgy
language:
Short-container-title:J. Jpn. Soc. Powder Powder Metallurgy

Author:

Nose Masateru,Kawabata Tokimasa,Ueda Shouhei,Nagae Takekazu,Saiki Atsushi,Matsuda Kenji,Terayama Kiyoshi,Ikeno Susumu

Publisher

Japan Society of Powder and Powder Metallurgy

Subject

Materials Chemistry,Metals and Alloys,Industrial and Manufacturing Engineering,Mechanical Engineering

Reference17 articles.

1. Deposition of α-Al2O3 hard coatings by reactive magnetron sputtering

2. 2) M. Åstrand, T. I. Selinder, F. Fietzke, and H. Klosermann: "PVD-Al₂O₃-coated cemented carbide cutting tools", Surf. Coat. Technol., 188-189 (2004) 186-192.

3. 3) The Ceramics Society of Japan: "Handbook of Ceramics [Application]", 2nd Edition, Gihodo Shuppan (Tokyo), (2002) 916-919.

4. Deposition of AlN films by reactive sputtering: Effect of radiofrequency substrate bias

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1. Investigation on the microstructure and high-temperature properties of AlN coating through oxygen addition;Ceramics International;2024-09

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