Quantitative Analysis of Fluorine and Oxygen by X-ray Fluorescence Spectrometry Using a Layered Structure Analyzer

Abstract

Recently, layered structure analyzers (called LSA for short) or layered synthetic microstructures (called LSM) with d spacing of several tens of Å, have been developed for use as X-ray analyzing devices in wave-length dispersive spectrometers. The lower detection limit for light elements of atomic numbers lower than 13 , such as aluminum, sodium, fluorine, oxygen, carbon and so on, has been greatly improved.There have been several reports published regarding LSA (or LSM) applications to light element analyses.