Xrf With Tunable Monochromatic Excitation and Variation of the Incidence Angle

Abstract

The x-ray source of our instrument is a rotating anode system with a silver target. It is flanged to a He-filled monochromator chamber. The photon energy of the x-rays for the excitation of characteristic specimen radiation can be tuned continuously from IkeV to 30 keV. The cross-section of the beam - monochromatic or polychromatic tube radiation - leaving the monochromator chamber is variable within 0.1 and 100mm2. A Be-window separates the evacuable specimen chamber from the monochromator chamber. The specimen holder allows for a linear movement of the specimen in x- and y-direction normal to the beam of incident x-radiation and allows a laterally resolved analysis. A rotation around an axis normal to the incident x-ray beam enables investigations under variable incidence- and take-off angles. X-ray detection is performed by an energy dispersive system.