Theoretical Formulas for Film Thickness Measurement by Means of Fluorescence X-Rays

Abstract

AbstractThe fluorescence x-ray method of the coating thickness measurement is theoretically studied. The theoretical formulas of the fluorescence x-ray intensity from the coating and from the substrate are obtained which include the enhancement effect between the coating and the substrate. The formulas are applied to the following examples and are confirmed experimentally: zinc on steel; tin on steel; aluminum on steel and on PMMA. The experimental results agree well with the theoretical results.