Grazing Incidence X-Ray Characterization of Materials

Abstract

AbstractA review of the methods of characterization of materials using X-rays incident at grazing angles is presented. The rationale of all such methods is the need to obtain information from near-surface regions. The methods include grazing incidence diffraction, reflectivity, diffuse scatter and fluorescence. The experimental techniques are outlined, and the information obtainable and the methods of interpretation are discussed.