Optimization Design of MPCVD Single Crystal Diamond Growth Based on Plasma Diagnostics-Reference-Cited by-同舟云学术

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Optimization Design of MPCVD Single Crystal Diamond Growth Based on Plasma Diagnostics

Published:2023 Issue:12 Volume:38 Page:1405
ISSN:1000-324X
Container-title:Journal of Inorganic Materials
language:en
Short-container-title:Journal of Inorganic Materials

Author:

LI Yicun,HAO Xiaobin,DAI Bing,WEN Dongyue,ZHU Jiaqi,GENG Fangjuan,YUE Weiping,LIN Weiqun

Publisher

Shanghai Institute of Ceramics

Subject

Inorganic Chemistry,General Materials Science

Reference25 articles.

1. ARNAULT J, SAADA S, RALCHENKO V. CVD grown single crystal diamond: a review. Physica Status Solidi (RRL)-Rapid Research Letters, 2022, 16: 2100354.

2. ZHENG Y, CHENGMING L I, LIU J, et al. Chemical vapor deposited diamond with versatile grades: from gemstone to quantum electronics. Frontiers of Materials Science, 2022, 16: 220590.

3. LIU K, ZHANG S, RALCHENKO V, et al. Tailoring of typical color centers in diamond for photonics. Advanced Materials, 2021, 33: 2000891.

4. LIU K, ZHANG S, LIU B J, et al. Investigating the energetic band diagrams of oxygen-terminated CVD grown e6 electronic grade diamond. Carbon, 2020, 169: 440.

5. MOKUNO Y, CHAYAHARA A, YAMADA H. Synthesis of large single crystal diamond plates by high rate homoepitaxial growth using microwave plasma CVD and lift-off process. Diamond and Related Materials, 2008, 17(4/5): 415.

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1. The 4-inch free-standing diamond film prepared by MPCVD at 10kW;Functional Diamond;2024-05-22

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