Correlation between Stacking Faults in Epitaxial Layers of 4H-SiC and Defects in 4H-SiC Substrate
-
Published:2019
Issue:7
Volume:34
Page:748
-
ISSN:1000-324X
-
Container-title:Journal of Inorganic Materials
-
language:en
-
Short-container-title:Journal of Inorganic Materials
Author:
GUO Yu,PENG Tong-Hua,LIU Chun-Jun,YANG Zhan-Wei,CAI Zhen-Li
Publisher
Shanghai Institute of Ceramics
Subject
Inorganic Chemistry,General Materials Science