Guest Editorial: Special Section on Micro-Opto-Electro-Mechanical Systems
Author:
Publisher
SPIE-Intl Soc Optical Eng
Subject
General Engineering,Atomic and Molecular Physics, and Optics
Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Fabrication and Characterization of Three-Dimensional Microlens Arrays in Sol-Gel Glass;Journal of Microelectromechanical Systems;2006-10
2. Silicon-based micro and subwavelength optical elements and applications;SPIE Proceedings;2006-08-31
3. Realization of free-space optical pickup head with stacked Si-based phase elements;IEEE Photonics Technology Letters;2005-01
4. Realization of optical pickup head by using stacked silicon-based micro-optical system;Novel Optical Systems Design and Optimization VII;2004-10-22
5. Micro-optical element on SiN membrane;Lithographic and Micromachining Techniques for Optical Component Fabrication II;2003-11-04
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