Model-based SRAF insertion through pixel-based mask optimization at 32nm and beyond

Author:

Sakajiri Kyohei,Tritchkov Alexander,Granik Yuri

Publisher

SPIE

Cited by 13 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Investigating Machine Learning Applications for FDSOI MOS-Based Computer-Aided Design;2023 9th International Conference on Signal Processing and Communication (ICSC);2023-12-21

2. CTM-SRAF: Continuous Transmission Mask-Based Constraint-Aware Subresolution Assist Feature Generation;IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems;2023-10

3. Sub-resolution assist feature placement with generative adversarial network;Journal of Micro/Nanopatterning, Materials, and Metrology;2021-11-12

4. GAN-SRAF: Subresolution Assist Feature Generation Using Generative Adversarial Networks;IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems;2021-02

5. Machine Learning in Physical Verification, Mask Synthesis, and Physical Design;Machine Learning in VLSI Computer-Aided Design;2019

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