Author:
Gao Pengzheng,Zhang Libin,Wei Yayi
Cited by
2 articles.
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1. Inverse Lithography with Structured Sub-Resolution Assist Features;2024 2nd International Symposium of Electronics Design Automation (ISEDA);2024-05-10
2. CTM-SRAF: Continuous Transmission Mask-Based Constraint-Aware Subresolution Assist Feature Generation;IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems;2023-10