Author:
Lin Xiaohui,Ling Tao,Subbaraman Harish,Guo L. Jay,Chen Ray T.
Cited by
1 articles.
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1. Roll-to-roll UV imprinting lithography for micro/nanostructures;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2015-11