1. Reviewing the Evolution of the NAND Flash Technology;Monzio Compagnoni,2017
2. Evaluation of deep learning model for 3D profiling of HAR features using high-voltage CD-SEM;Wei,2021
3. AI-guided OCD metrology for single HAR sub-micron via measurement;Fu-Sheng,2023
4. High resolution profiles of 3D NAND pillars using x-ray scattering metrology;Fan,2021
5. Inline metrology of high aspect ratio hole tilt and center line shift using small-angle x-ray scattering;Peter;J. Micro/Nanopattern. Mater. Metrol,2023