Publisher
SPIE-Intl Soc Optical Eng
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference83 articles.
1. Silicon Torsional Scanning Mirror
2. See http://www.phsmems.com/download/MemsMarket.pdf.
3. See http://www.gii.co.jp/press/ci12037_en.shtml.
4. See http://www.instat.com/newmk.asp?ID=683.
5. Development of micro-electro-mechanical optical scanner
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