Oxidation resistance of Ru-capped EUV multilayers-Reference-Cited by-同舟云学术

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Oxidation resistance of Ru-capped EUV multilayers

Published:2005-05-06 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
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Author:

Bajt Sasa,Dai Zu Rong,Nelson Erik J.,Wall Mark A.,Alameda Jennifer,Nguyen Nhan,Baker Sherry,Robinson Jeffrey C.,Taylor John S.,Clift Miles,Aquila Andy,Gullikson Eric M.,Edwards N. V. Ginger

Publisher

SPIE

Cited by 27 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Stress, reflectance, and stability of Ru/Be multilayer coatings with Mo interlayers near the 11 nm wavelength;Optics Letters;2024-06-25

2. 6.X nm下一代极紫外多层膜技术研究进展;Chinese Journal of Lasers;2024

3. Microstructural evaluation of sputtered Ru–Pt multilayer anti-stick coatings for glass molding;Materials & Design;2022-08

4. Time-frequency analysis assisted determination of ruthenium optical constants in the sub-EUV spectral range 8 nm – 23.75 nm;Optics Express;2021-11-24

5. Ultrafast laser-induced strain waves in thin ruthenium layers;Optics Express;2021-09-21

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