Fabrication and testing of nanomechanical <100> silicon beam structures using a scanning probe system-Reference-Cited by-同舟云学术

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Fabrication and testing of nanomechanical <100> silicon beam structures using a scanning probe system

Published:2002-11-01 Issue: Volume: Page:
ISSN:0277-786X
Container-title:Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
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Author:

Virwani Kumar R.,Malshe Ajay P.,Schmidt W. F.,Sood Dinesh K.

Publisher

SPIE

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Nanofabrication, effects and sensors based on micro-electro-mechanical systems technology;Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences;2013-10-13

2. Confirmation on the size-dependence of Young's modulus of single crystal silicon from the TEM tensile tests;2010 IEEE Sensors;2010-11

3. Young's modulus size effect of SCS nanobeam by tensile testing in electron microscopy;2009 IEEE Sensors;2009-10

4. Mechanical Researches on Young's Modulus of SCS Nanostructures;Journal of Nanomaterials;2009

5. A MEMS device for in-situ TEM test of SCS nanobeam;Science in China Series E: Technological Sciences;2008-08-08

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