Author:
Dave Aasutosh,Yoshimoto Kenji,Sturtevant John
Cited by
2 articles.
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1. Stochastic model prediction of pattern-failure;Metrology, Inspection, and Process Control for Microlithography XXXIV;2020-03-20
2. Ultimate Limits of Pattern Stability Due to Thermal Vibrations;ECS Transactions;2017-08-15