Effect of PACVD deposition of nitride and Si-containing amorphous hydrogenated carbon films on the tribological characteristics of SiAlON ceramics
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Published:2021-08-01
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Container-title:Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XVIII
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Volosova Marina A.,Fedorov Sergey,Lyakhovetskiy Maxim,Mustafaev Enver,Melnik Yury