DPT restricted design rules for advanced logic applications

Author:

Deng Yunfei,Ma Yuangsheng,Yoshida Hidekazu,Kye Jongwook,Levinson Harry J.,Sweis Jason,Coskun Tamer H.,Kamat Vishnu

Publisher

SPIE

Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Post-decomposition optimizations using pattern matching and rule-based clustering for multi-patterning technology;Design-Process-Technology Co-optimization for Manufacturability XII;2018-03-20

2. Cut Mask Optimization With Wire Planning in Self-Aligned Multiple Patterning Full-Chip Routing;IEEE Transactions on Very Large Scale Integration (VLSI) Systems;2017-02

3. Layout pattern-driven design rule evaluation;Journal of Micro/Nanolithography, MEMS, and MOEMS;2014-12-17

4. Layout pattern-driven design rule evaluation;SPIE Proceedings;2014-03-28

5. Pattern matching for identifying and resolving non-decomposition-friendly designs for double patterning technology (DPT);SPIE Proceedings;2013-03-29

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