Novel photonics dielectric substrate process integration development cycle time reduction by Inline Xe Plasma FIB

Author:

Feige Mona Susanne,Schmitt Daniel,Vogler Ute,Pearl Haim,Lee Allen,Schubert Thomas

Publisher

SPIE

Reference8 articles.

1. Yole MicroLED 2023 Market and Technology Report

2. Winthrop A., Baylies and Christopher JL Moore, BayTech-Resor LLC, Maynard, MA. “The use of sapphire in the manufacturing of Light Emitting Diodes (LEDs) is covered in the second part of a two-part series,” Solid-state technology insights for electronics manufacturing.

3. High Temperature and Power Dependent Photoluminescence Analysis on Commercial Lighting and Display LED Materials for Future Power Electronic Modules

4. Khan Academy, “LED - color & fabrication”. https://www.khanacademy.org/science/in-in-class-12th-physics-india/in-in-semiconductors/x51bd77206da864f3:optoelectronic-devices/v/led-color-fabrication

5. A Comparative Study of Gallium-, Xenon-, and Helium-Focused Ion Beams for the Milling of GaN

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