Improving the accuracy of surface metrology

Author:

Nesbitt Ryder

Publisher

SPIE-Intl Soc Optical Eng

Subject

General Engineering,Atomic and Molecular Physics, and Optics

Reference7 articles.

1. Laser metrology — a diagnostic tool in automotive development processes

2. K. Vakil , “Automated outer mold line (OML) Measurements And Control,” inProccedings of the Coordinate Metrology Society Conference(2010).

3. V. A. Ukraintsev, M. C. Tsai, T. Lii, and R. A. Jackson , “Transition from precise to accurate critical dimension metrology,” inMetrology, Inspection, and Process Control for Proc. SPIE6518, 65181H (2007).

4. R. M. Kurtz , “Directed Acoustic Shearography,” inPhotonics in the Transportation Industry: Proc. SPIE7675, 76750B (2010).

5. R. Paschotta , “Phase shift method for distance measurements,” http://www.rp-photonics.com/phase_shift_method_for_distance_mea-surements.html (2010).

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