Empirical correlator for stochastic local CD uniformity in extreme ultraviolet lithography
Author:
Affiliation:
1. IMEC, Leuven, Belgium
2. ASML Technology Development Center, Chandler, Arizona, United States
Publisher
SPIE-Intl Soc Optical Eng
Subject
General Arts and Humanities
Reference22 articles.
1. Shot noise, LER, and quantum efficiency of EUV photoresists
2. Novel method for characterizing resist performance
3. The tri-lateral challenge of resolution, photospeed, and LER: scaling below 50nm?
4. Evaluation of Chemical Gradient Enhancement Methods for Chemically Amplified Extreme Ultraviolet Resists
5. Mechanistic simulation of line-edge roughness
Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Budget Analysis of Multiple Parameters in EUV Lithography System Based on Support Vector Machine;2024 2nd International Symposium of Electronics Design Automation (ISEDA);2024-05-10
2. Optical diffraction-based methodology to measure on-product EUV exposure focus variations;Metrology, Inspection, and Process Control XXXVIII;2024-04-10
3. Dynamic budget analysis of multiple parameters in a lithography system based on the superposition of light intensity fluctuations;Optics Express;2024-01-30
4. Rigorous 3D probabilistic computational lithography and chip-level inspection for EUV stochastic failure detection;International Conference on Extreme Ultraviolet Lithography 2023;2023-11-21
5. Stochastic hotspots in extreme ultraviolet exposed nano-patterns as correlated molecular sub-cluster formation probabilities;Journal of Applied Physics;2023-06-15
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3