Resonant 1D MEMS mirror with a total optical scan angle of 180° for automotive LiDAR-Reference-Cited by-同舟云学术

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Resonant 1D MEMS mirror with a total optical scan angle of 180° for automotive LiDAR

Published:2020-02-28 Issue: Volume: Page:
ISSN:
Container-title:MOEMS and Miniaturized Systems XIX
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Author:

Schwarz Fabian,Senger Frank,Albers Jörg,Malaurie Pauline,Janicke Christian,Pohl Leon,Heinrich Felix,Kaden Dirk,Quenzer Hans-Joachim,Lofink Fabian,Bahr Andreas,von Wantoch Thomas,Hofmann Ulrich

Publisher

SPIE

Cited by 28 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Motion nonlinearity of gimbaled MEMS micromirror in omnidirectional scanning;Microsystem Technologies;2024-08-31

2. A polymer trench filling based silicon isolation technique and its application to two-axis scanning comb-drive micromirrors;Sensors and Actuators A: Physical;2024-05

3. An Electromagnetic Indirect-Driving Scanning Mirror for Wide-Field Coaxial Lidar Applications;2024

4. Robust real-time estimation of non-uniform angular velocity and sub-pixel jitter in images captured with resonant scanners;Optics Express;2023-12-12

5. Single-Crystal PMN-PT-Laminated Piezoelectric Scanning Micromirror for Laser Beam Scanning Applications;IEEE Sensors Journal;2023-09-15

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