A new reactive atom plasma technology (RAPT) for precision machining: the etching of ULE optical surfaces
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SPIE
Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. 1.6 Precision Grinding, Lapping, Polishing, and Post-Processing of Optical Glass;Comprehensive Materials Finishing;2017
2. Shape correction of optical surfaces using plasma chemical vaporization machining with a hemispherical tip electrode;Applied Optics;2012-01-20
3. Surface crystallization of amorphous fused silica during electron cyclotron resonance plasma etching;Acta Physica Sinica;2012
4. Plasma Chemical Vaporization Machining with a Pipe Electrode for Optical Fabrication: a Review;International Journal of Electrical Machining;2012
5. Removal characteristics of plasma chemical vaporization machining with a pipe electrode for optical fabrication;Applied Optics;2010-08-06
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