Author:
Petric Paul,Bevis Chris,Brodie Alan,Carroll Allen,Cheung Anthony,Grella Luca,McCord Mark,Percy Henry,Standiford Keith,Zywno Marek
Cited by
23 articles.
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1. Multi e-beam direct write: what are the options for the future?;Journal of Micro/Nanopatterning, Materials, and Metrology;2023-12-06
2. Cost-effective and channel-scalable hardware decoders for multiple electron-beam direct-write systems;Journal of Micro/Nanolithography, MEMS, and MOEMS;2018-08-22
3. Parallel compression/decompression-based datapath architecture for multibeam mask writers;Journal of Micro/Nanolithography, MEMS, and MOEMS;2017-11-07
4. Electron beam throughput from raster to imaging;SPIE Proceedings;2016-12-22
5. Impact of parallelism on data volumes for a multibeam mask writer;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2016-11