Silicon photonic microelectromechanical systems add-drop ring resonator in a foundry process-Reference-Cited by-同舟云学术

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Silicon photonic microelectromechanical systems add-drop ring resonator in a foundry process

Published:2022-11-04 Issue:04 Volume:2 Page:
ISSN:2708-5260
Container-title:Journal of Optical Microsystems
language:
Short-container-title:J. Optical Microsystems

Author:

Sattari Hamed¹,Takabayashi Alain Yuji¹,Edinger Pierre²,Verheyen Peter³,Gylfason Kristinn B.²,Bogaerts Wim⁴,Quack Niels¹

Affiliation:

1. École Polytechnique Fédérale de Lausanne, Lausanne, Switzerland

2. KTH Royal Institute of Technology, School of Electrical Engineering and Computer Science, Division of Micro and Nanosystems, Stockholm, Sweden

3. Interuniversity Microelectronics Centre, Leuven, Belgium

4. Ghent University, Ghent, Belgium

Publisher

SPIE-Intl Soc Optical Eng

Subject

General Engineering

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A 3 Degrees-of-Freedom Electrothermal Micro-Positioner for Optical Chip-to-Chip Alignment;Journal of Microelectromechanical Systems;2024-04

2. Fully reconfigurable MEMS-based second-order coupled-resonator optical waveguide (CROW) with ultra-low tuning energy;Optics Express;2023-11-10

3. Integrated silicon photonic MEMS;Microsystems & Nanoengineering;2023-03-20

4. Vacuum-sealed silicon photonic MEMS tunable ring resonator with an independent control over coupling and phase;Optics Express;2023-02-08

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