Metal-assisted chemical etching of silicon with different metal films and clusters: a review
Author:
Affiliation:
1. National Research Univ. of Electronic Technology (Russian Federation)
2. Institute of Nanotechnology Microelectronics INME (Russian Federation)
Publisher
SPIE
Reference13 articles.
1. Nonlithographic Patterning and Metal-Assisted Chemical Etching for Manufacturing of Tunable Light-Emitting Silicon Nanowire Arrays
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Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Influence of the Formation Temperature of the Morphology of por-Si Formed by Pd-Assisted Chemical Etching;Semiconductors;2020-08
2. Modulation of Agglomeration of Vertical Porous Silicon Nanowires and the Effect on Gas-Sensing Response;Advanced Engineering Materials;2017-12-14
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