Author:
Wang Shibing,Baron Stanislas,Kachwala Nishrin,Kallingal Chidam,Su Jing,Zhang Quan,Shu Vincent,Gao Jin-Wei,Ser Jung-Hoon,Li Zero,Elsaid Ahmad,Chen Been-Der,Fong Weichun,Sun Dezheng,Howell Rafael,Hsu Stephen D.,Luo Larry,Zou Yi,Zhang Gary,Lu Yen-Wen,Cao Yu
Reference7 articles.
1. The new OPC method for obtaining the stability of MBAF OPC;Song,2017
2. Simultaneous Source Mask Optimization (SMO);Socha,2005
3. An Innovative Source-Mask co-Optimization (SMO) Method for Extending Low k1 Imaging;Hsu,2008
4. Manufacturing Challenges for Curvilinear Masks;Spence,2017
5. Machine learning assisted SRAF placement for full chip;Wang,2017
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