Surface roughness measurement accuracy analysis of grinded silicon wafer by white light scanning interferometry (WLSI)

Author:

Zhao Linjie,Zhou Ping,Yan Ying,Bai Qian,Wang YiQi,Guo Dongming

Publisher

SPIE

Reference10 articles.

1. The study of the resin-bond diamond wheel for IC silicon wafer nanoscale roughness back grinding;Li,2011

2. Research on soft abrasive wheel for ultra-precision grinding of silicon wafer;Sang,2009

3. Research on microstructure large-scale characterization method based on white light scanning interferometry;Chang,2009

4. Research on white light scanning interferometry method and system;Long,2011

5. Experimental study on the white light interference fringes of Michelson interferometer;Wu;Journal of Logistical Engineering University,2012

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