1. Interaction of 3D mask effects and NA in EUV lithography;Neumann,2012
2. 3D reticle effects for high NA EUV lithography;Neumann,2012
3. Mask effects for high-NA EUV: impact of NA, chief-ray-angle, and reduction ratio;Neumann,2013
4. Imaging performance of EUV lithography optics configuration for sub-9nm resolution;Neumann,2015
5. EUV lithography optics for sub 9nm resolution;Migura,2014