Properties of fluoride DUV excimer laser optics: influence of the number of dielectric layers-Reference-Cited by-同舟云学术

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Properties of fluoride DUV excimer laser optics: influence of the number of dielectric layers

Published:2000-03-03 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
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Author:

Arens Winfried,Ristau Detlev,Ullmann Jens,Zaczek Christoph,Thielsch Roland,Kaiser Norbert,Duparre Angela,Apel Oliver,Mann Klaus R.,Lauth Hans,Bernitzki Helmut,Ebert Johanes,Schippel Stefan,Heyer H.

Publisher

SPIE

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Residual stress birefringence of highly reflective mirrors with different numbers of layers;Applied Optics;2019-12-17

2. Characterization of Interfacial Layer of DUV Coatings by Spectroscopic Ellipsometry;Advanced Materials Research;2013-02

3. Exterior surface damage of calcium fluoride outcoupling mirrors for DUV lasers;Optics Express;2009-04-30

4. The study of ultraviolet properties of resistant-boat evaporated LaF3 films;Acta Physica Sinica;2008

5. Interfacial absorption of DUV coatings;Laser-Induced Damage in Optical Materials: 2000;2001-04-12

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