Diamond-like-carbon as a novel capping material for EUV mask blanks-Reference-Cited by-同舟云学术

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Diamond-like-carbon as a novel capping material for EUV mask blanks

Published:2022-09-16 Issue: Volume: Page:
ISSN:
Container-title:Photomask Japan 2022: XXVIII Symposium on Photomask and Next-Generation Lithography Mask Technology
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Author:

Rook Katrina,Daof JoJo,Checco Antonio,Saghayezhian Mohammad,Yamamoto Kenji,Lee Meng H.,Chee Marjorie

Publisher

SPIE

Reference11 articles.

1. Design and performance of capping layers for EUV multilayer mirrors

2. Properties and Classification of Diamond-Like Carbon Films

3. Magnetic system for producing uniform coatings using a filtered cathodic arc

4. Center for X-Ray Optics, https://henke.lbl.gov/optical_constants/

5. A. V. Tikhonravov, M. K. Trubetskov, OptiLayer thin film software, www.optilayer.com.

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