1. OVL accuracy fundamentals;Kandel,2012
2. OVL Quality Metric;Cohen,2012
3. Quality metric for accurate OVL control in <20nm nodes;Klein,2013
4. Overlay accuracy calibration;Amit,2013
5. Innovative Techniques for Improving Overlay Accuracy by Using DCM (Device Correlated Metrology) Target as Reference;Tzai,2014