Process and metrology developments in the production of immersion gratings-Reference-Cited by-同舟云学术

Process and metrology developments in the production of immersion gratings

Published:2018-07-10 Issue: Volume: Page:
ISSN:
Container-title:Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation III
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Author:

Brooks Cynthia B.,Kidder Benjamin T.,Grigas Michelle M.,Jaffe Daniel T.

Publisher

SPIE

Reference6 articles.

1. GMTNIRS: progress toward the Giant Magellan Telescope near-infrared spectrograph;Jaffe,2016

2. Production and evaluation of silicon immersion gratings for infrared astronomy

3. Manufacturing of silicon immersion gratings for infrared spectrometers;Wang,2010

4. New metrology techniques improve the production of silicon diffractive optics;Brooks,2014

5. Benjamin T. Kidder, Cynthia B. Brooks, MichelleM. Grigas, Daniel T. Jaffe, “Manufacturing silicon immersion gratings for GMTNIRS on 150-mm material”, Paper 10706–73, this proceeding.

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