1. Modeling polarization for Hyper-NA lithography tools and masks;Lai,2007
2. Intrinsic birefringence in calcium fluoride and barium fluoride
3. Polarization analysis of optical systems;Chipman,1989
4. Polarization aberration in hyper-numerical aperture projection printing: a comparison of various representations;MuIntyre,2006
5. Polarization aberration analysis in optical lithography systems;Kye,2006