Simultaneous determination of optical constants, local thickness, and local roughness of thin films by imaging spectroscopic reflectometry-Reference-Cited by-同舟云学术

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Simultaneous determination of optical constants, local thickness, and local roughness of thin films by imaging spectroscopic reflectometry

Published:2015-09-24 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
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Author:

Nečas David,Ohlídal Ivan,Vodák Jiří,Ohlídal Miloslav,Franta Daniel

Publisher

SPIE

Reference48 articles.

1. Investigation of effective-medium models of microscopic surface roughness by spectroscopic ellipsometry

2. Optical properties of rough thin films

3. Characterization of X-UV multilayers by grazing incidence X-ray reflectometry

4. Comparison of effective medium approximation and Rayleigh–Rice theory concerning ellipsometric characterization of rough surfaces

5. Rayleigh, J. W. S., [Theory of Sound], vol. 2, Macmillan and co., London (1877).

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