Author:
Zangooie Shahin,Li Jie,Boinapally Karthik,Wilkens Peter,Ver Avraham,Khamsepour Babak,Schroder Holger,Piggot John,Yedur Sanjay,Liu Zhuan,Hu Jiangtao
Reference7 articles.
1. Diffraction analysis of dielectric surface-relief gratings
2. R.M.A. Azzam and N.M. Bashara, Ellipsometry and Polarized Light, North Holland, New York, 1987.
3. Harald G. Tompkins, A User’s Guide to Ellipsometry, Academic Press, California, 1993.
4. Use of multiple azimuthal angles to enable advanced scatterometry applications;Sendelbach,2010
5. A hotistic metrology approach: hybrid metrology utilizing scatterometry, CD-AFM, and CD-SEM;Vaid,2011
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献