1. Designs of optical system for metrology & inspection of Semiconductor and Display II;Lee,2014
2. Smith, W. J., [Modern Optical Engineering], McGraw-Hill, New York & San Francisco, 160–163 (2000).
3. Wafer inspection technology challenger for ULSI manufacturing;Stokowski,1998
4. Anamorphic approach for developing hi-efficiency illumination system to inspect defects on semiconductor wafer;Han,2017
5. Rudolf Kingslake, [Optical System Desing], Institude of Optics University of Rochester, New York, 21–22 (1983).